Nova Measuring Instruments Ltd. is a leading global semiconductor equipment manufacturer with solutions and services that are used by 21 of the largest 25 IC manufacturers. Nova’s expertise in Thin Film and Optical CD & shape profiling metrology systems are addressing the complex measurement and process control challenges of High Volume Production (HVM) in 300 & 200 mm IC manufacturing, from 90nm to the demanding 45nm and 32nm technology nodes.
The company's systems utilize a combination of Spectroscopic Reflectrometry and Scatterometry to measure CD, trench depth, photoresist height, thickness and shape of complex layer stacks, as well as a variety of other features and parameters guaranteeing the delivery of tight wafer-to-wafer and within-wafer control. Nova offers Integrated Metrology (IM) and Stand-alone (SA) metrology product lines addressing different metrology needs. These hardware products are complemented by advanced structure modeling and application development software empowering fab engineers with the automation and flexibility necessary to develop in-fab 2D/3D and in-die applications for high-end semiconductor devices.
Nova Measuring Instruments Ltd.
Weizmann Science Park, Bldg. 22
P.O. Box 266
Rehovot 76100 - Israel